Kohei Hayama

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Speaker, Author, Co-Author

Tue. Mar 16, 2021 5:00 PM - 5:50 PM P13 (Poster)

Poster presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[16p-P13-1~2] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

5:00 PM - 5:50 PM

[16p-P13-2] A Study on the Suspension Structures of In-Plane Vibrational Au-MEMS Devices

〇(B)Kohei Hayama¹, Kosuke Kawashima¹, Muneoki Sawada¹, Kentarou Tamura¹, Daisuke Yamane^1,2 (1.Ritsumeikan Univ., 2.JST PRESTO)