Shun Kiyose

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Speaker, Author, Co-Author

Thu. Mar 18, 2021 1:30 PM - 5:15 PM Z24 (Z24)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[18p-Z24-1~14] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

3:45 PM - 4:00 PM

△ [18p-Z24-9] MEMS vapor cells with monolithically integrated alkali metal dispensing component

〇(M2)Shun Kiyose¹, Yoshikazu Hirai¹, Osamu Tabata², Toshiyuki Tsuchiya¹ (1.Kyoto Univ., 2.Kyoto Univ. of Adv. Sci.)