Akihiro Uchiyama

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Speaker, Author, Co-Author

Thu. Mar 18, 2021 1:30 PM - 5:15 PM Z24 (Z24)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[18p-Z24-1~14] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

4:00 PM - 4:15 PM

△ [18p-Z24-10] A study on a single-axis Au proof-mass MEMS accelerometer with a wide detection range of acceleration

〇(M1)Akihiro Uchiyama¹, Takashi Ichikawa¹, Kohei Shibata¹, Shin-ichi Iida², Lee Sangyeop¹, Noboru Ishihara¹, Katsuyuki Machida¹, Kazuya Masu¹, Hiroyuki Ito¹ (1.Tokyo Tech, 2.NTT-AT)

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