[18p-Z24-1~14] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

△ [18p-Z24-10] A study on a single-axis Au proof-mass MEMS accelerometer with a wide detection range of acceleration

〇(M1)Akihiro Uchiyama¹, Takashi Ichikawa¹, Kohei Shibata¹, Shin-ichi Iida², Lee Sangyeop¹, Noboru Ishihara¹, Katsuyuki Machida¹, Kazuya Masu¹, Hiroyuki Ito¹ (1.Tokyo Tech, 2.NTT-AT)

Keywords:MEMS accelerometer, proof-mass, wide detection range

This paper describes a single-axis Au proof-mass MEMS(microelectro mechanical systems) accelerometer with a wide detection range from micro-G level to 20 G. We have developed the arrayed MEMS accelerometers with many proof-masses. In order to realize the CMOS-MEMS accelerometer with a wide detection range, we propose the MEMS accelerometer, which consists of two different proof-masses, that can detect an acceleration between 20 G and a micro-G level. In conclusion, from the fabrication and experimental results, we can confirm that the proposed device has a potential for detecting a wide range from micro-G level to 20 G.