The 68th JSAP Spring Meeting 2021

Presentation information

Oral presentation

13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[18p-Z24-1~14] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Thu. Mar 18, 2021 1:30 PM - 5:15 PM Z24 (Z24)

Seiichiro Higashi(Hiroshima Univ.), Tatsuya Okada(Univ. of the Ryukyus)

4:15 PM - 4:30 PM

[18p-Z24-11] Measurement system by photogate type fluorescent sensor for identification of Legionella

Yuto Honda1, Yong-Joon Choi1, Kensuke Murakami1, Hiromu Ishii1, Toshihiko Noda1, Kazuhiro Takahashi1, Kazuaki Sawada1, Katsuyuki Machida2, Hiroyuki Ito2, Mitsumasa Saito3, Yasuhiko Nikaido3 (1.Toyohashi Univ. of Technology, 2.Tokyo Inst of .Technology, 3.Univ. of Occupational and Environmental Health)

Keywords:Semiconductor, Filter-free fluorescence sensor, Legionella