The 68th JSAP Spring Meeting 2021

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13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[18p-Z24-1~14] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Thu. Mar 18, 2021 1:30 PM - 5:15 PM Z24 (Z24)

Seiichiro Higashi(Hiroshima Univ.), Tatsuya Okada(Univ. of the Ryukyus)

2:15 PM - 2:30 PM

[18p-Z24-4] Study of wet etching for Ge-on-Insulator fabrication by etchback method

〇Noboru Shimizu1, Keisuke Yamamoto1, Dong Wang1, Hiroshi Nakashima2 (1.Kyushu Univ., 2.GIC, Kyushu Univ.)

Keywords:Ge, Ge-on-Insulator, wet etching