The 68th JSAP Spring Meeting 2021

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Poster presentation

13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[16p-P13-1~2] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Tue. Mar 16, 2021 5:00 PM - 5:50 PM P13 (Poster)

5:00 PM - 5:50 PM

[16p-P13-1] Performance of CLC poly-Si1-xGex TFTs on glass substrates

〇Akito Hara1, Kuninori Kitahara2 (1.Tohoku Gakuin Univ., 2.Shimane Univ.)

Keywords:TFT, Si, Ge