The 68th JSAP Spring Meeting 2021

Daisuke Ohori

Speaker, Author, Co-Author

Thu. Mar 18, 2021 1:30 PM - 5:15 PM Z24 (Z24)

  • Oral presentation
  • | 13 Semiconductors
  • | 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Wed. Mar 17, 2021 1:30 PM - 6:00 PM Z26 (Z26)

  • Oral presentation
  • | 13 Semiconductors
  • | 13.5 Semiconductor devices/ Interconnect/ Integration technologies