3:30 PM - 3:45 PM
[18p-Z24-8] Crystallization of SiN Capped InSb Films on Glass by RTA
Keywords:InSb, RTA, Crystallization
Oral presentation
13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology
Thu. Mar 18, 2021 1:30 PM - 5:15 PM Z24 (Z24)
Seiichiro Higashi(Hiroshima Univ.), Tatsuya Okada(Univ. of the Ryukyus)
3:30 PM - 3:45 PM
Keywords:InSb, RTA, Crystallization