1:00 PM - 1:30 PM
[18p-Z33-1] [The 11th Promotion and Nurturing of Female Researchers Contribution Award Speech] Fabrication of new ZnO-based mateirals by magnetron sputter epitaxy
Keywords:oxide semiconductors, oxynitride semiconductors, sputtering
Presentation information
Oral presentation
21 Joint Session K "Wide bandgap oxide semiconductor materials and devices" » 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"
[18p-Z33-1~17] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"
Thu. Mar 18, 2021 1:00 PM - 6:00 PM Z33 (Z33)
Tetsuya Yamamoto(Kochi Univ. of Tech.), Keisuke Ide(Tokyo Tech), Kohei SHIMA(Tohoku Univ.)