The 68th JSAP Spring Meeting 2021

Presentation information

Poster presentation

8 Plasma Electronics » 8 Plasma Electronics(Poster)

[19a-P02-1~9] 8 Plasma Electronics(Poster)

Fri. Mar 19, 2021 9:00 AM - 9:50 AM P02 (Poster)

9:00 AM - 9:50 AM

[19a-P02-8] Low-temperature Formation of High-Mobility IGZO Thin Film Transistors using Reactive Plasma Processes (III)

Kosuke Takenaka1, Hiroyuki Hirayama1, Tomoki Fujimura1, Yuji Hayashi1, Giichiro Uchida2, Akinori Ebe3, Yuichi Setsuhara1 (1.Osaka Univ., 2.Meijo Univ., 3.EMD Corp.)

Keywords:IGZO, AOS