[19a-P02-1~9] 8 Plasma Electronics(Poster)

[19a-P02-9] Development of Pulse-Arc-Plasma-Jet Source with Coaxial Gas Line for DLC High-Rate Deposition

〇Toru Harigai¹, Ryoya Tominaga¹, Hikaru Ohhra¹, Hirofumi Takikawa¹, Kohtaku Suzuki², Shinsuke Kunitsugu³, Hidenobu Gonda⁴ (1.Toyohashi Univ. Technol., 2.Wakasa Wan Energy Res. Cent., 3.Ind. Technol. Cent. Okayama Pref., 4.OSG Coat. Service)

Keywords:diamond-like carbon, arc plasma jet