[19a-Z13-1~8] 6.1 Ferroelectric thin films

△ [19a-Z13-3] Characterization of tetragonal (1-x)(Bi,Na)TiO₃- xBaTiO₃ films deposited on various substrates.

〇Keisuke Ishihama¹, Akinori Tateyama¹, Takao Shimizu^1,3, Yusuke Sato², Wakiko Yamaoka², Risako Tsurumaru², Hiroshi Funakubo¹ (1.Tokyo Tech., 2.TDK corp., 3.NIMS)

Keywords:Lead-free piezoelectric material, Ferroelectric, Thin film

Recently, the application of thin-film MEMS such as piezoelectric sensors has attracted much attention, and the development of alternative materials to toxic lead-based piezoelectric materials is strongly demanded. The lead-free piezoelectric material (Bi, Na)TiO₃-BaTiO₃ has been well studied near the MPB composition, while studies on other compositions are still limited. We report that (Bi, Na)TiO₃-BaTiO₃ films are successfully deposited on various substrates in a wide composition range, and the ferroelectricity and piezoelectricity of each film.