2021年第68回応用物理学会春季学術講演会

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6 薄膜・表面 » 6.3 酸化物エレクトロニクス

[19a-Z14-1~11] 6.3 酸化物エレクトロニクス

2021年3月19日(金) 09:00 〜 12:00 Z14 (Z14)

高橋 竜太(日大)

11:30 〜 11:45

[19a-Z14-10] Field-effect transistor based on two-dimensional carrier gas at the FeOy/SrTiO3 interface

Anh Duc Le1,2,3、Theodorus J. Wijaya1、Shingo Kaneta-Takada1、Masaaki Tanaka1,4、Shinobu Ohya1,2,4 (1.Dept of EEIS, Tokyo Univ.、2.IEI, Tokyo Univ.、3.PRESTO, JST、4.CSRN, Tokyo Univ.)

キーワード:perovskite oxides, two dimensional hole gas, field effect transistor

Our recent discovery of both isolated two dimensional (2D) hole gas (2DHG) and 2D electron gas (2DEG) with ultrahigh mobilities at FeOy/SrTiO3 interfaces [1] paves a novel way to realize oxide-based devices such as diodes and transistors. Here, as a proof of concept, we demonstrate field-effect transistor (FET) operation using the 2DHG on SrTiO3 substrates with a back-gate configuration. At low temperatures (~3.5 K), these FET devices exhibit excellent performance, with subthreshold swing values of ~30 mV/dec and on-off ratios of ~107. We found that the underlying mechanism for this high-performance switching involves a tunneling process at the pn junctions. Refs: [1] L. D. Anh et al., Adv. Mater. 32, 1906003 (2020).