The 68th JSAP Spring Meeting 2021

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6 Thin Films and Surfaces » 6.4 Thin films and New materials

[19a-Z15-1~10] 6.4 Thin films and New materials

Fri. Mar 19, 2021 9:00 AM - 11:30 AM Z15 (Z15)

Yoshinobu Nakamura(Univ. of Tokyo), Hiroshi Murotani(Tokai Univ.)

10:30 AM - 10:45 AM

[19a-Z15-7] Effect of Buffer Layers for Transfer Process of Anatase Nb: TiO2 Epitaxial Thin Films to Flexible Sheets Using Water-soluble Sacrificial Layer

〇Akihiro Hiraoka1, Nobuhiro Kato2, Kohei Fujiwara3, Hiroaki Nisikawa2 (1.Grad. Sch. B.O.S.T., Kindai Univ., 2.Fac. B.O.S.T., Kindai Univ., 3.IMR, Tohoku Univ.)

Keywords:Niobium doped Titanium Oxide, Epitaxial Thin Films, Epitaxial Lift-off