[19a-Z27-1~9] 15.4 III-V-group nitride crystals

[19a-Z27-7] Luminescent properties of Si-doped AlN substrates grown by HVPE on freestanding AlN

〇Shigefusa Chichibu¹, Kohei Shima¹, Kazunobu Kojima¹, Moody Baxter², Seiji Mita², Ramon Collazo³, Zlatko Sitar³, Yoshinao Kumagai⁴, Akira Uedono⁵ (1.IMRAM-Tohoku Univ., 2.Adroit Materials, 3.NC State University, 4.Tokyo Uni Agr Tech, 5.Univ. of Tsukuba)

Keywords:semiconductor, AlN, CL spectra

CL spectra of Si-doped AlN substrates grown by HVPE on PVT-AlN substrates will be explained.