[19a-Z31-1~11] 17.3 Layered materials

[19a-Z31-10] Transistor type liquid sensor using vertically aligned MoS2 thin film

〇Joonam Kim^1,2, Takenobu Funatsu¹, Mutsumi Sugiyama^1,2 (1.Tokyo Univ. of Sci., 2.RIST TUS)

Keywords:MoS2, Vertical aligned, Liquid sensor

MoS₂, which has a layer structure, is expected to be applied to liquid sensor devices because it has excellent mobility and chemical stability even though one layer's thickness is under 1 nm. In particular, it has been reported that the sensitivity of the sensor was improved by adsorbing molecules to the sulfur vacancies of the MoS₂ thin film. The layer of MoS₂ is grown perpendicular to the substrate (Vertically aligned MoS₂: V-MoS₂) has higher sulfur vacancy density on the surface than a layer of MoS₂ is grown parallel (Parallel aligned MoS₂: P-MoS₂) to the substrate. Hence, it was expected that the sensitivity would be improved as well. In this study, we made a transistor-type liquid sensor using P-MoS₂ and V-MoS₂ and examined the sensitivity characteristics.