[19a-Z32-1~10] 23.1 Joint Session N "Informatics"

△ [19a-Z32-2] Development of Analysis Method for Unknown Components Estimation in XPS spectral analysis

〇(M1)Ryo Murakami¹, Hayaru Shouno¹, Hiroshi Shinotsuka², Kenji Nagata², Hideki Yoshikawa² (1.UEC, 2.NIMS)

Keywords:XPS, Spectral analysis

The development of a method that can perform spectral analysis even when there is a missing part in the reference spectrum group is an important issue for realizing a fully automatic analysis of spectra. In this study, we aimed to develop a method to automatically analyze spectra with the missing parts of the reference spectra as unknown components. The proposed method is capable of estimating not only the peak parameters of the known/unknown components but also the number of peaks representing the unknown components.