[19p-P02-1~22] 17 Nanocarbon Technology(Poster)

[19p-P02-15] Fabrication of high-quality van der Waals heterostructures by the bubble-free transfer technique

〇Takuya Iwasaki¹, Eiichiro Watanabe¹, Daiju Tsuya¹, Yoshifumi Morita², Shu Nakaharai¹, Yutaka Wakayama¹, Kenji Watanabe¹, Takashi Taniguchi¹, Satoshi Moriyama³ (1.NIMS, 2.Gunma Univ., 3.Tokyo Denki Univ.)

Keywords:van der Waals heterostructure, transfer technique for two-dimensional material, quantum Hall effect

In recent years, van der Waals heterostructures have attracted attention since the emergent quantum phenomena/device functionality could be controlled by unprecedented degrees of freedom such as the material combination, stacking angle, and interlayer distance. To investigate these characteristics in detail and apply them to practical devices, the fabrication technology of high-quality heterostructure is indispensable. In this study, we report a "bubble-free transfer technique" by which the interfacial bubble formation can be avoided.