[19p-Z07-1~9] 3.7 Laser processing

[19p-Z07-4] [Highlight]Microfabrication of ITO transparent conductive film and formation of micro-metal grid structure

〇Akira Watanabe¹, Ashiqur Rahman¹, Megumi Komada² (1.IMRAM, Tohoku Univ., 2.Sumitomo Chemical)

Keywords:flexible transparent electrode, laser ablation, ITO-metal grid hybrid structure

A flexible transparent electrode which shows no conductivity degradation during bending is an important component in flexible electronics. We have developed a new fabrication process by laser ablation for a flexible transparent film consisting of ITO (Indium Tin Oxide) microstructures and metal microgrid structures with a linewidth less than 5 micrometer which is visually transparent. The flexible transparent film has conductiviy in all surface area and high retention of conductivity during bending.