[19p-Z07-1~9] 3.7 Laser processing

[19p-Z07-5] Fabrication of Miniature Internal Threads with Reduced Cracks by Laser Processing in Rhodamine Aqueous Solution

Takumi Seko¹, 〇Shigeki Matsuo¹ (1.Shibaura Inst. Tech.)

Keywords:miniature screw, glass, Laser-induced backside wet etching

We have reported the fabrication of S0.5 miniature internal threads on glass substrates by focusing subnanosecond laser pulses at the water-glass interface. In the previous reports, however, cracks were generated in the glass, and the strength was not as high as expected. In this study, we attempted to use Rhodamine aqueous solution instead of water to reduce the cracks. As a result, the cracks were reduced and the strength was improved when the concentration was 0.75 mol/L or higher.