The 68th JSAP Spring Meeting 2021

Presentation information

Print

Oral presentation

3 Optics and Photonics » 3.7 Laser processing

[19p-Z07-1~9] 3.7 Laser processing

Fri. Mar 19, 2021 1:30 PM - 4:00 PM Z07 (Z07)

Yasutaka Hanada(Hirosaki Univ.), Shuntaro Tani(Univ. of Tokyo)

3:15 PM - 3:30 PM

[19p-Z07-7] Structural change of DLC film on Si induced by picosecond laser irradiation

〇Keisuke Takabayashi1, Khaidir Khamaron1, Makoto Yamaguchi1, Takuro Tomita2, Takashi Takahashi3, Yohei Kobayashi3 (1.Akita Univ., 2.Tokushima Univ., 3.University of Tokyo)

Keywords:laser abration, Raman spectroscopy, DLC