[19p-Z13-1~14] 6.1 Ferroelectric thin films

△ [19p-Z13-7] Characterization of piezoelectric MEMS vibration energy harvester
with two-degree-of-freedom system under impulsive force

〇(M1)Aphayvong Sengsavang¹, Takeshi Yoshimura¹, Kensuke Kanda², Shuichi Murakami³, Norifumi Fujimura¹ (1.Osaka Pref. Univ, 2.Uni. of Hyogo, 3.ORIST)

Keywords:piezoelectric vibration energy harvesting, impulsive force, two-degree-of-freedom system

Piezoelectric vibration energy harvesting (pVEH) has attracted a lot of attention as the power source for self-powered devices. To expand the application area of the pVEH, we are focusing on energy harvesting from random vibration. In previous work, we have investigated the electromechanical response of conventional MEMS pVEHs with single-degree-of-freedom (SDOF) system under impulsive force, a simplified form of random vibration. The results showed that the output power is almost independent of the resonance frequency of the pVEHs even with hundreds of the mechanical Q factor.¹ Furthermore, we have reported that the output power can be enhanced using a dynamic magnifier (DM), known as two-degree-of-freedom (2DOF) system. The theoretical analysis suggests that DM with high Q factor is effective for the enhancement.² Thus, in this study, the electromechanical properties of pVEH with high Q-DM were investigated under impulsive forces.