[19p-Z24-1~10] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[19p-Z24-10] Fabrication and evaluation of diamond SBD using Minimal fab (III)

〇Hideyuki Watanabe¹, Kazumasa Nemoto¹, Noriko Miura², Masashi Kase¹, Takashi Yajima¹, Shuichi Noda¹, Hitoshi Umezawa¹, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.AIST, 2.MINIMAL)

Keywords:diamond, CMP, Minimal fab