Hidetoshi Mimura

→ Search for Hidetoshi Mimura in Google Scholar

Speaker, Author, Co-Author

Tue. Sep 20, 2022 9:00 AM - 11:30 AM A406 (A406)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[20a-A406-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

9:30 AM - 9:45 AM

[20a-A406-3] Classification of surface states on chlorosilane reacted Si using machine learning

〇Hidetoshi Mimura¹, Leonid Bolotov², Yuunosuke Sakai¹, Tetsuo Yamamoto¹, Takafumi Sasaki¹, Noriyuki Uchida² (1.KOKUSAI ELECTRIC Co., 2.AIST-DTech)