Oral presentation
13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology
Tue. Sep 20, 2022 9:00 AM - 11:30 AM A406 (A406)
Keisuke Yamamoto(Kyushu Univ.), Noriyuki Uchida(AIST)
△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above
9:00 AM - 9:15 AM
〇Haruto Saito1, Katsunori Makihara1, Noriyuki Taoka1, Akio Ohta1, Seiichi Miyazaki1 (1.Nagoya Univ.)
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9:15 AM - 9:30 AM
〇Leonid Bolotov1, Hidetoshi Mimura2, Yunosuke Sakai2, Tetsuo Yamamoto2, Takafumi Sasaki2, Noriyuki Uchida1 (1.AIST-DTech, 2.Kokusai Elec. Co.)
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9:30 AM - 9:45 AM
〇Hidetoshi Mimura1, Leonid Bolotov2, Yuunosuke Sakai1, Tetsuo Yamamoto1, Takafumi Sasaki1, Noriyuki Uchida2 (1.KOKUSAI ELECTRIC Co., 2.AIST-DTech)
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9:45 AM - 10:00 AM
〇Hiroiki Hayakawa1, Ken Hoshino1, Yusuke Mori1, Takamitsu Ochi1, Keiki Nagai1, Makoto Fujiwara1 (1.KIOXIA)
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10:00 AM - 10:15 AM
〇(M2)Satoshi Takayama1, Sasaki Nobuo1,2, Uraoka Yukiharu1 (1.NAIST, 2.Sasaki Consulting)
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10:30 AM - 10:45 AM
〇WENCHANG YEH1, Masato Ohya1, Yusaku Magari1 (1.Shimane Univ.)
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10:45 AM - 11:00 AM
〇Tatsuya Sagawa1, Kotaro Kusunoki1, Akito Hara1 (1.Tohoku Gakuin Univ.)
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11:00 AM - 11:15 AM
〇Akihisa Nagayoshi1, Kaisei Nomura1, Akito Hara1 (1.Tohoku Gakuin Univ.)
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11:15 AM - 11:30 AM
〇(M2)Shingo Nasu1, Dong Wang1, Keisuke Yamamoto1 (1.IGSES, Kyushu Univ)
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