Leonid Bolotov

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Speaker, Author, Co-Author

Tue. Sep 20, 2022 9:00 AM - 11:30 AM A406 (A406)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[20a-A406-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

9:15 AM - 9:30 AM

▲ [20a-A406-2] Dissociation Reaction of Si₂Cl₆ on Si(100): the Scanning Tunneling Spectroscopy Study

〇Leonid Bolotov¹, Hidetoshi Mimura², Yunosuke Sakai², Tetsuo Yamamoto², Takafumi Sasaki², Noriyuki Uchida¹ (1.AIST-DTech, 2.Kokusai Elec. Co.)