Satoshi Takayama

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Speaker, Author, Co-Author

Tue. Sep 20, 2022 9:00 AM - 11:30 AM A406 (A406)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[20a-A406-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

10:00 AM - 10:15 AM

[20a-A406-5] Evaluation of pits generated on CW laser crystallized Si thin film

〇(M2)Satoshi Takayama¹, Sasaki Nobuo^1,2, Uraoka Yukiharu¹ (1.NAIST, 2.Sasaki Consulting)