Shingo Nasu

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Speaker, Author, Co-Author

Tue. Sep 20, 2022 9:00 AM - 11:30 AM A406 (A406)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[20a-A406-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

11:15 AM - 11:30 AM

[20a-A406-9] Improvement of current drivability for metal S/D Ge n-MOSFET
by introduction of recessed channel structure (II)

〇(M2)Shingo Nasu¹, Dong Wang¹, Keisuke Yamamoto¹ (1.IGSES, Kyushu Univ)