Tatsuya Sagawa

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Speaker, Author, Co-Author

Tue. Sep 20, 2022 9:00 AM - 11:30 AM A406 (A406)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[20a-A406-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

10:45 AM - 11:00 AM

[20a-A406-7] Performance of polycrystalline SiGe thin-film transistors on glass substrates

〇Tatsuya Sagawa¹, Kotaro Kusunoki¹, Akito Hara¹ (1.Tohoku Gakuin Univ.)