Masahiro Kaneko

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Speaker, Author, Co-Author

Wed. Sep 21, 2022 1:15 PM - 6:45 PM B203 (B203)

Oral presentation
| 21 Joint Session K "Wide bandgap oxide semiconductor materials and devices"
| 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[21p-B203-1~20] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

1:15 PM - 1:30 PM

△ [21p-B203-1] Heteroepitaxial growth of β-(Al_xGa_1-x)₂O₃/β-(In_xGa_1-x)₂O₃/β-Ga₂O₃ thin films via mist CVD

〇Masahiro Kaneko¹, Hiroyuki Nishinaka¹, Kazutaka Kanegae¹, Masahiro Yoshimoto¹ (1.Kyoto Inst. Tech.)