Hiroto Kondo

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Speaker, Author, Co-Author

Wed. Sep 21, 2022 9:00 AM - 11:15 AM A406 (A406)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[21a-A406-1~8] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

9:30 AM - 9:45 AM

[21a-A406-3] Low Temperature Growth of Ge and Si/Ge Films on SiO₂ and Their TEM Observations

〇Hiroto Kondo¹, Keisuke Arimoto¹, Kosuke Hara¹, Junji Yamanaka¹ (1.Univ. of Yamanashi)