Kenta Moto

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Speaker, Author, Co-Author

Wed. Sep 21, 2022 9:00 AM - 11:15 AM A406 (A406)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[21a-A406-1~8] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

10:30 AM - 10:45 AM

[21a-A406-6] Formation of Rectifying Schottky Contact on Polycrsysalline P-type Ge

〇Kenta Moto^1,2, Kaoru Toko³, Tomonari Takayama¹, Toshifumi Imajo³, Keisuke Yamamoto¹ (1.Kyushu Univ., 2.JSPS Res. Fellow, 3.Univ. of Tsukuba)