Toshiyuki Horiuchi

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Speaker, Author, Co-Author

Tue. Sep 20, 2022 9:00 AM - 12:30 PM C101 (C101)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[20a-C101-1~13] 7.3 Micro/Nano patterning and fabrication

9:45 AM - 10:00 AM

[20a-C101-4] Verification of Resist Patterning by Stereophonic Projection Lithography Using a Pair of Parabolic Mirrors Illuminated by Collimated Light from a Blue Light-Emitting-Diode

〇Toshiyuki Horiuchi¹, Hiroshi Kobayashi¹ (1.Tokyo Denki Univ.)