Tomohiro Mishima

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Speaker, Author, Co-Author

Thu. Sep 22, 2022 9:00 AM - 11:30 AM A202 (A202)

Oral presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[22a-A202-1~9] 6.2 Carbon-based thin films

10:00 AM - 10:15 AM

△ [22a-A202-5] Chemical state changes of Si-containing DLC film by the soft X-ray irradiation

〇(M1)Tomohiro Mishima¹, Koji Nakanishi¹, Masahito Niibe¹, Yuichi Haruyama¹, Kazuhiro Kanda¹ (1.LASTI, Univ. Hyogo)