The 83rd JSAP Autumn Meeting 2022

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6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[22a-A202-1~9] 6.2 Carbon-based thin films

Thu. Sep 22, 2022 9:00 AM - 11:30 AM A202 (A202)

Yasuharu Ohgoe(Tokyo Denki Univ.)

10:00 AM - 10:15 AM

△ [22a-A202-5] Chemical state changes of Si-containing DLC film by the soft X-ray irradiation

〇(M1)Tomohiro Mishima1, Koji Nakanishi1, Masahito Niibe1, Yuichi Haruyama1, Kazuhiro Kanda1 (1.LASTI, Univ. Hyogo)

Keywords:Diamond-like carbon