Oral presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[22a-A202-1~9] 6.2 Carbon-based thin films

Thu. Sep 22, 2022 9:00 AM - 11:30 AM A202 (A202)

△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above

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9:00 AM - 9:15 AM

[22a-A202-1] Shape changes in amorphous carbon films by laser irradiation

〇Dai Harada¹, Sarayut Tunmee², Yuko Aono¹, Chanan Euaruksakun², Ukit Rittihong², Yuki Hirata¹, Naoto Ohtake¹, Hiroki Akasaka¹ (1.Tokyo Tech, 2.Sync. Light Res. Inst.)

9:15 AM - 9:30 AM

[22a-A202-2] Evaluation of structural change on hydrogenated amorphous carbon films by sliding

〇Sota Norizuki¹, Yuki Hirata¹, Naoto Ohtake¹, Hiroki Akasaka¹ (1.Tokyo Tech.)

9:30 AM - 9:45 AM

△ [22a-A202-3] Thermal decomposition prosses of highly-hydrogenated diamond-like carbon(DLC) films

〇Daisuke Niwa¹, Tomohiro Mishima¹, Koji Nakanishi¹, Kazuhiro Kanda¹, Masaya Takeuchi², Noki Fukumuro² (1.LASTI,Univ.Hyogo, 2.Eng.Univ.Hyogo)

9:45 AM - 10:00 AM

[22a-A202-4] Measurements of thermal annealed a-C:H films by positron annihilation spectroscopy

〇Setsuo Nakao¹, Atsushi Kinomura², Atsushi Yabuuchi², Kotaku Suzuki³ (1.AIST, 2.KURNS, 3.WERC)

10:00 AM - 10:15 AM

△ [22a-A202-5] Chemical state changes of Si-containing DLC film by the soft X-ray irradiation

〇(M1)Tomohiro Mishima¹, Koji Nakanishi¹, Masahito Niibe¹, Yuichi Haruyama¹, Kazuhiro Kanda¹ (1.LASTI, Univ. Hyogo)

10:30 AM - 10:45 AM

△ [22a-A202-6] Molecular Dynamics Simulation of Amorphous Carbon Growth on Sapphire Surface

〇QIANG YUE¹, TAISHI KANAYAMA¹, KOTA MATSUO¹, RYOMA NISHIKAWA¹, REKI NAKAMOTO¹, TAKAYOSHI YOKOYA², YUJI MURAOKA² (1.Okayama Univ., 2.RIIS-Okayama Univ.)

10:45 AM - 11:00 AM

[22a-A202-7] Relationship between film thickness and sp³ content in amorphous carbon films on sapphire substrates

〇Yuji Muraoka¹, Taishi Kanayama², Yue Qiang², Takanori Wakita¹, Takayoshi Yokoya¹ (1.Okayama Univ. RIIS, 2.Okayama Univ.)

11:00 AM - 11:15 AM

△ [22a-A202-8] Relationship between Injected Gas and DLC Deposition Rate on Gas-Injection Pulsed Plasma CVD Method

〇Hikaru Ohhra¹, Naoto Nagata¹, Takahiro Bando¹, Hirofumi Takikawa¹, Toru Harigai¹, Shinsuke Kunitsugu², Hidenobu Gonda³ (1.Toyohashi Univ. Technol., 2.Ind. Technol. Cent. Okayama Pref., 3.OSG Coating Service Co., Ltd.)

11:15 AM - 11:30 AM

[22a-A202-9] Effect of input power density on deposition of diamond-like carbon film by high power pulsed magnetron sputtering

〇Takayuki Ohta¹, Jo Matsushima¹, Akinori Oda², Hiroyuki Kousaka³ (1.Meijo Univ., 2.Chiba Inst. Technol., 3.Gifu Univ.)

Session information

[22a-A202-1~9] 6.2 Carbon-based thin films

[22a-A202-1] Shape changes in amorphous carbon films by laser irradiation

[22a-A202-2] Evaluation of structural change on hydrogenated amorphous carbon films by sliding

△ [22a-A202-3] Thermal decomposition prosses of highly-hydrogenated diamond-like carbon(DLC) films

[22a-A202-4] Measurements of thermal annealed a-C:H films by positron annihilation spectroscopy

△ [22a-A202-5] Chemical state changes of Si-containing DLC film by the soft X-ray irradiation

△ [22a-A202-6] Molecular Dynamics Simulation of Amorphous Carbon Growth on Sapphire Surface

[22a-A202-7] Relationship between film thickness and sp³ content in amorphous carbon films on sapphire substrates

△ [22a-A202-8] Relationship between Injected Gas and DLC Deposition Rate on Gas-Injection Pulsed Plasma CVD Method

[22a-A202-9] Effect of input power density on deposition of diamond-like carbon film by high power pulsed magnetron sputtering

Authenticate

Session information

[22a-A202-1~9] 6.2 Carbon-based thin films

[22a-A202-1] Shape changes in amorphous carbon films by laser irradiation

[22a-A202-2] Evaluation of structural change on hydrogenated amorphous carbon films by sliding

△ [22a-A202-3] Thermal decomposition prosses of highly-hydrogenated diamond-like carbon(DLC) films

[22a-A202-4] Measurements of thermal annealed a-C:H films by positron annihilation spectroscopy

△ [22a-A202-5] Chemical state changes of Si-containing DLC film by the soft X-ray irradiation

△ [22a-A202-6] Molecular Dynamics Simulation of Amorphous Carbon Growth on Sapphire Surface

[22a-A202-7] Relationship between film thickness and sp3 content in amorphous carbon films on sapphire substrates

△ [22a-A202-8] Relationship between Injected Gas and DLC Deposition Rate on Gas-Injection Pulsed Plasma CVD Method

[22a-A202-9] Effect of input power density on deposition of diamond-like carbon film by high power pulsed magnetron sputtering

Authenticate

[22a-A202-7] Relationship between film thickness and sp³ content in amorphous carbon films on sapphire substrates