Takayuki Ohta

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Speaker, Author, Co-Author

Thu. Sep 22, 2022 9:00 AM - 11:30 AM A202 (A202)

Oral presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[22a-A202-1~9] 6.2 Carbon-based thin films

11:15 AM - 11:30 AM

[22a-A202-9] Effect of input power density on deposition of diamond-like carbon film by high power pulsed magnetron sputtering

〇Takayuki Ohta¹, Jo Matsushima¹, Akinori Oda², Hiroyuki Kousaka³ (1.Meijo Univ., 2.Chiba Inst. Technol., 3.Gifu Univ.)