Hikaru Ohhra

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Speaker, Author, Co-Author

Thu. Sep 22, 2022 9:00 AM - 11:30 AM A202 (A202)

Oral presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[22a-A202-1~9] 6.2 Carbon-based thin films

11:00 AM - 11:15 AM

△ [22a-A202-8] Relationship between Injected Gas and DLC Deposition Rate on Gas-Injection Pulsed Plasma CVD Method

〇Hikaru Ohhra¹, Naoto Nagata¹, Takahiro Bando¹, Hirofumi Takikawa¹, Toru Harigai¹, Shinsuke Kunitsugu², Hidenobu Gonda³ (1.Toyohashi Univ. Technol., 2.Ind. Technol. Cent. Okayama Pref., 3.OSG Coating Service Co., Ltd.)

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