Ryota Sato

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Speaker, Author, Co-Author

Tue. Sep 20, 2022 9:00 AM - 11:45 AM B203 (B203)

Oral presentation
| 21 Joint Session K "Wide bandgap oxide semiconductor materials and devices"
| 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[20a-B203-1~10] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

9:00 AM - 9:15 AM

[20a-B203-1] Preparation of Cu_xO film by mist CVD method - Relationship between mist spatial distribution in a tube furnace and film structure -.

〇(M2)Ryota Sato¹, Kojun Yokoyama¹, Hajime Shirai¹ (1.Saitama Univ.)