Keisuke Kimura

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Speaker, Author, Co-Author

Wed. Sep 21, 2022 1:00 PM - 5:45 PM A106 (A106)

Oral presentation
| 15 Crystal Engineering
| 15.5 Group IV crystals and alloys

[21p-A106-1~18] 15.5 Group IV crystals and alloys

4:45 PM - 5:00 PM

[21p-A106-15] Impacts of Si Capping Layer in Formation of Ultra-Thin Nickel Silicide Film

〇Keisuke Kimura¹, Noriyuki Taoka¹, Shunsuke Nishimura¹, Akio Ohta¹, Katsunori Makihara¹, Seiichi Miyazaki¹ (1.Grad. Sch. of Eng., Nagoya Univ.)