Yui Suzuki

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Speaker, Author, Co-Author

Thu. Sep 22, 2022 9:00 AM - 10:15 AM A406 (A406)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[22a-A406-1~5] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

9:30 AM - 9:45 AM

△ [22a-A406-3] Development of a liquid detection sensor system based on capacitance change between electrodes

〇Yui Suzuki¹, Fuminobu Imaizumi¹ (1.NIT, Oyama)