Oral presentation

13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[22a-A406-1~5] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Thu. Sep 22, 2022 9:00 AM - 10:15 AM A406 (A406)

Yan Wu(Nihon Univ.)

△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above

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9:00 AM - 9:15 AM

△ [22a-A406-1] Noise floor estimation of Au proof-mass single-axis MEMS sensor module

〇Akira Onishi¹, Kisuke Miyado¹, Devi Srujana Tenneti¹, Parthojit Chakraborty¹, Katsuyuki Machida¹, Taiki Ogata¹, Hirotaka Uchitomi¹, Tso-Fu Mark Chang¹, Masato Sone¹, Yoshihiro Miyake¹, Hiroyuki Ito¹ (1.Tokyo Tech)

9:15 AM - 9:30 AM

△ [22a-A406-2] Study of simplified analytical damping constant model of Au MEMS capacitive accelerometer with perforated proof-mass structure

〇Kisuke Miyado¹, Akira Onishi¹, Devi Srujana Tenneti¹, Parthojit Chakraborty¹, Katsuyuki Machida¹, Shin-ichi Iida², Toshifumi Konishi², Masato Sone¹, Yoshihiro Miyake¹, Hiroyuki Ito¹ (1.Tokyo Tech, 2.NTT-AT)

9:30 AM - 9:45 AM

△ [22a-A406-3] Development of a liquid detection sensor system based on capacitance change between electrodes

〇Yui Suzuki¹, Fuminobu Imaizumi¹ (1.NIT, Oyama)

9:45 AM - 10:00 AM

▲ [22a-A406-4] Tailoring of Magnetic Sensing Performances of Single-crystal Diamond MEMS Magnetic Sensors via Interlayers

〇(P)Zilong Zhang¹, Liwen Sang¹, Yasuo Koide¹, Satoshi Koizumi¹, Meiyong Liao¹ (1.NIMS)

10:00 AM - 10:15 AM

△ [22a-A406-5] A Study on Electrical Characteristics of Self-Assembled Electrets for MEMS Vibration Energy Harvesters

〇(B)Ruichen Li¹, Reiki Sugimoto², Kosuke Kawashima², Yuya Tanaka³, Daisuke Yamane^1,2 (1.Ritsumeikan Univ., 2.GSSE, Ritsumeikan Univ., 3.GSST, Gunma Univ.)

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