Akira Onishi

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Speaker, Author, Co-Author

Thu. Sep 22, 2022 9:00 AM - 10:15 AM A406 (A406)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[22a-A406-1~5] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

9:00 AM - 9:15 AM

△ [22a-A406-1] Noise floor estimation of Au proof-mass single-axis MEMS sensor module

〇Akira Onishi¹, Kisuke Miyado¹, Devi Srujana Tenneti¹, Parthojit Chakraborty¹, Katsuyuki Machida¹, Taiki Ogata¹, Hirotaka Uchitomi¹, Tso-Fu Mark Chang¹, Masato Sone¹, Yoshihiro Miyake¹, Hiroyuki Ito¹ (1.Tokyo Tech)

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