Zilong Zhang

→ Search for Zilong Zhang in Google Scholar

Speaker, Author, Co-Author

Thu. Sep 22, 2022 9:00 AM - 10:15 AM A406 (A406)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[22a-A406-1~5] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

9:45 AM - 10:00 AM

▲ [22a-A406-4] Tailoring of Magnetic Sensing Performances of Single-crystal Diamond MEMS Magnetic Sensors via Interlayers

〇(P)Zilong Zhang¹, Liwen Sang¹, Yasuo Koide¹, Satoshi Koizumi¹, Meiyong Liao¹ (1.NIMS)