Ruichen Li

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Speaker, Author, Co-Author

Thu. Sep 22, 2022 9:00 AM - 10:15 AM A406 (A406)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[22a-A406-1~5] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

10:00 AM - 10:15 AM

△ [22a-A406-5] A Study on Electrical Characteristics of Self-Assembled Electrets for MEMS Vibration Energy Harvesters

〇(B)Ruichen Li¹, Reiki Sugimoto², Kosuke Kawashima², Yuya Tanaka³, Daisuke Yamane^1,2 (1.Ritsumeikan Univ., 2.GSSE, Ritsumeikan Univ., 3.GSST, Gunma Univ.)

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