Masanari Inukai

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Speaker, Author, Co-Author

Thu. Sep 22, 2022 4:00 PM - 6:00 PM P17 (Arena)

Poster presentation
| 15 Crystal Engineering
| 15.4 III-V-group nitride crystals

[22p-P17-1~11] 15.4 III-V-group nitride crystals

4:00 PM - 6:00 PM

[22p-P17-3] Dependence of AlN Layer Coverage on N₂ Gas Flow Rate in the MF2DS Formation

〇Masanari Inukai¹, Akihiro Hashimoto¹ (1.Univ. of Fukui)