[22p-P17-1~11] 15.4 III-V-group nitride crystals

[22p-P17-3] Dependence of AlN Layer Coverage on N₂ Gas Flow Rate in the MF2DS Formation

〇Masanari Inukai¹, Akihiro Hashimoto¹ (1.Univ. of Fukui)

Keywords:graphene, AlN