[22p-A307-1~17] CS.7 Code-sharing Session of 6.1 & 13.3 & 13.5

2:00 PM - 2:15 PM

[22p-A307-3] Structural analysis of ferroelectric Hf_xZr_1−xO₂/TiN fabricated using atomic layer deposition with different oxidant

〇(P)Takashi Onaya^1,2,3, Toshihide Nabatame², Takahiro Nagata², Shigenori Ueda², Yong Chan Jung⁴, Heber Hernandez-Arriaga⁴, Jaidah Mohan⁴, Jiyoung Kim⁴, Chang-Yong Nam⁵, Esther H. R. Tsai⁵, Koji Kita⁶, Shinji Migita¹, Hiroyuki Ota¹, Yukinori Morita¹ (1.AIST, 2.NIMS, 3.JSPS Research Fellow PD, 4.UT Dallas, 5.Brookhaven Nat. Lab., 6.Univ. Tokyo)

Takashi Onaya

Speaker, Author, Co-Author

[22p-A307-1~17] CS.7 Code-sharing Session of 6.1 & 13.3 & 13.5

[22p-A307-3] Structural analysis of ferroelectric HfxZr1−xO2/TiN fabricated using atomic layer deposition with different oxidant

[22p-A307-3] Structural analysis of ferroelectric Hf_xZr_1−xO₂/TiN fabricated using atomic layer deposition with different oxidant