Yuki Ogawa

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Speaker, Author, Co-Author

Tue. Sep 20, 2022 1:30 PM - 6:00 PM B201 (B201)

Oral presentation
| 15 Crystal Engineering
| 15.4 III-V-group nitride crystals

[20p-B201-1~16] 15.4 III-V-group nitride crystals

3:45 PM - 4:00 PM

[20p-B201-9] Sputtering Temperature Dependence on Crystallinity of a-plane AlN Fabricated by Sputtering and Annealing

〇(M1)Yuki Ogawa¹, Kota Shibutani¹, Kenjiro Uesugi^2,3, Shiyu Xiao¹, Kanako Shojiki¹, Hideto Miyake¹ (1.Grad. Sch. of Eng. Mie Univ., 2.MRPCO, 3.Grad. Sch. of RIS.)

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